Thanks to optimized electro-optical systems, the new Regulus series delivers a resolution of up to 0.7 nm for the Regulus8220 / 8230/8240 and 0.8 nm for the Regulus8100. The Regulus series uses a new Cold Field Emission (CFE) gun, optimized for high resolution imaging at low acceleration voltages. This CFE pistol can magnify high-resolution images up to 2 million times.